Annex 1 - Price Schedule-Pricing Form.xlsx

Halbautomatisches Wafersondiersystem für die Charakterisierung von 200-mm-Wafern

Extrahierter Dokumenttext · Stand: 20.09.2026, 06:01 (Europe/Berlin)

Herkunft: vergabemarktplatz.brandenburg.de

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Annex 1

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Annex 1 - Price Schedule / Pricing Form
Semi-automatic prober for characterization of 200 mm wafers
Tender number: IHP-2026-045
No.DescriptionQty.UnitUnit Price (€ net)Total Price (€ net)
AComplete Wafer Prober System
A.1Complete semi-automatic 200 mm wafer prober including shielded chamber, wafer loader, chuck stage and standard equipment according to the technical specification1lot0
A.2Six probes including Kelvin arms, Kelvin probe tips and magnetic bases1lot0
A.3Temperature control system (-60 °C to +300 °C)1lot0
A.4Automated microscope and optical system1lot0
A.5Camera systems including CCD color camera and lateral camera1lot0
A.6PC, Windows 11 Enterprise LTSC, control software, touchscreen, displays and accessories1lot0
A.7Measurement instrument shelf, cables, triaxial Kelvin interfaces and required accessories1lot0
BDelivery and Installation
B.1Packaging and shipment to IHP1lot0
B.2Delivery to Laboratory B2.55 including unloading and positioning1lot0
B.3Installation and setup1lot0
B.4Commissioning and functional testing1lot0
B.5Operator instruction/training1lot0
CIntegration
C.1Integration with existing Keithley 4200A-SCS1lot0
C.20.5–1 day on-site support by supplier technician1lot0
DSpare Parts
D.1Spare Kelvin probes / probe tips10pcs.0
EWarranty
E.1Minimum 2-year warranty1lotIncludedIncluded
FTOTAL0
No.Optional ItemUnitUnit Price (€ net)
O.1Additional on-site supportday5
O.2Additional operator trainingday
O.3Additional service/maintenance visitvisit
O.4Additional Kelvin probe / probe tippcs.
O.5Annual maintenance contract after warranty periodyear
O.6Other optional services—
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