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Service description
Semi-automatic prober for characterization of 200 mm wafers
Tender number: IHP-2026-045
Contracting party: IHP GmbH – Leibniz Institute for High Performance Microelectronics/ Leibniz-Institut für innovative Mikroelektronik Im Technologiepark 25 15236 Frankfurt (Oder)
- Scope of supply
The subject of this procurement is the supply, delivery, installation, commissioning, and integration of a semi-automatic wafer prober system for the electrical and temperature- dependent characterization of 200 mm wafers.
The complete system shall be suitable for DC and pulsed I-V measurements as well as low- frequency impedance measurements up to 10 MHz. The system shall be capable of integration with the Keithley 4200A-SCS characterization system already available in the laboratory.
The scope of supply shall include, as a minimum:
• Semi-automatic prober for characterization of 200 mm wafers. • Safe and easy-to-use wafer loading system. • Shielded prober chamber with chuck stage. • Six electrical probes for DC, pulsed I-V, and low-frequency impedance measurements up to 10 MHz. • Temperature-controlled chuck with a temperature range from -60 °C to +300 °C. • Automated microscope with bridge mount and programmable zoom. • CCD color camera. • Lateral camera inside the prober chamber for accurate vertical needle positioning and safe wafer-pad contacting. • Anti-vibration table. • Hardware control panel. • PC with Windows 11 Enterprise LTSC and software for complete system control. • Touchscreen including holder and an additional display for control of the Keithley 4200A-SCS characterization system. • Keyboard, mouse, and suitable tray/holder. • Measurement instrument shelf adapted to the Keithley 4200A-SCS. • All required interconnection cables and triaxial Kelvin FORCE/SENSE interfaces. • Installation, setup, commissioning, and operator support. • Integration of the prober with the existing Keithley 4200A-SCS system. • Spare Kelvin probes. • Complete technical and operating documentation. • Warranty and service as specified below.
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The system shall be supplied as a complete, fully functional solution. All components, interfaces, cables, software, accessories, and other items required for proper operation shall be included, even if not explicitly listed individually.
- Scope of services / Technical Requirements
2.1 Chuck and Wafer Loading
The prober shall be designed for the characterization of 200 mm wafers and shall be equipped with a safe and easy-to-use wafer loading system.
The chuck stage shall be located inside a shielded chamber and shall provide at least the following specifications:
• Total XY stage travel of approximately 210 × 300 mm. • XY resolution of at least 0.5 µm. • Adjustable movement speed. • Chuck theta rotation of at least ±5°. • Z travel range of at least 50 mm. • Z resolution of at least 0.2 µm. • Platen with a low thermal expansion/compression rate when exposed to temperature changes. • Chuck with holes for vacuum attachment of wafers. • Kelvin triaxial FORCE/SENSE connection at the chuck for low-noise measurements, including DC I-V and low-frequency impedance measurements up to 10 MHz.
The prober shall be installed on an anti-vibration table with low compressed-air consumption.
2.2 Electrical Probes
The system shall include six probes suitable for DC and pulsed I-V measurements as well as low- frequency impedance measurements up to 10 MHz.
Each probe shall provide at least:
• XYZ travel range of 13 mm minimum in each direction. • Magnetic base. • Kelvin arms including Kelvin probe tips. • Probe tip radius of 5 µm. • Operation at temperatures of up to at least 300 °C. • Standard triaxial connectors for FORCE/SENSE measurements. • All required cables.
2.3 Temperature Control
The prober shall include an integrated temperature-control system with:
• Temperature range from at least -60 °C to +300 °C.
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• Temperature setting/resolution in steps of 0.1 °C. • Automatic control via the system software. • Closed-loop cooling system.
The temperature-control system shall be suitable for electrical measurements and probe contacting at both elevated and reduced temperatures.
2.4 Optical System
The system shall be equipped with an automated microscope with bridge mount.
The microscope shall provide at least:
• Programmable zoom. • Optical magnification of up to 40×. • LED illumination.
The optical system shall be integrated with the prober control system.
2.5 CCD Cameras
A CCD color camera with at least the following specifications shall be included:
• Minimum resolution: 6 MP. • Image resolution: 2048 × 1538 pixels. • Frame rate: 120 fps minimum.
In addition, a lateral camera inside the prober chamber shall be provided. The camera shall allow accurate control of the vertical position of the probe needles and support safe and reliable contacting of the wafer pads.
2.6 Control, PC and IT System
The complete system shall be equipped with suitable hardware and software controls allowing convenient operation of the prober.
The scope of supply shall include:
• Hardware control panel. • PC for controlling the complete system. • Windows 11 Enterprise LTSC operating system. • Software suite for complete prober-system control. • Touchscreen including holder. • Additional screen for operation/control of the existing Keithley 4200A-SCS characterization system. • Keyboard. • Mouse. • Suitable tray/holder for the keyboard and mouse.
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The control of the prober and the operation of the characterization system shall be capable of being combined in a convenient and user-friendly manner.
The software and IT components shall be capable of integration into the existing IHP IT environment and shall comply with the current state of the art.
2.7 Integration with the existing Keithley 4200A-SCS
The offered prober system shall be technically capable of integration with the Keithley 4200A-SCS characterization system already available in the laboratory.
The description of the existing Keithley 4200A-SCS is as follows:
• 6 SMUs 4200-SMU each with a Preamplifier 4200-PA; • Capacitance-voltage unit 4210-CVU; • Pulse unit 4225-PMU with 2 RPMs 4225-RPM; • Multi-Switch 4200A-CVIV
The reference to the existing Keithley 4200A-SCS system describes the technical environment into which the supplied prober shall be integrated. It does not require the offered prober or any component to be manufactured by Keithley. Alternative technical solutions, interface concepts, adapters, switching solutions or other equivalent means of achieving the required functionality are permitted, provided that all mandatory technical and measurement requirements are fulfilled.
The supplier shall provide all components and services required for a complete and functional integration, including, as a minimum:
• measurement instrument shelf/support adapted to the existing Keithley 4200A-SCS system; • all required interconnection cables between the prober and the characterization system (from RPMs and Multi-Switch to the 6 probes and chuck); • triaxial Kelvin FORCE/SENSE interfaces between the Keithley 4200A-SCS and the prober; • all cables, connectors and interfaces required for FORCE/SENSE measurements; • suitable signal routing and switching of functional units (SMUs, PMU, and CVU) between the relevant measurement probes; • technical provisions required for low-noise DC and pulsed I-V and low-frequency impedance measurements up to 10 MHz; • technical provisions for capacitance measurements using the chuck terminal; • all hardware and software interfaces required for operation of the integrated measurement setup.
The proposed integration concept shall ensure that the specified measurement functions can be performed with the existing Keithley 4200A-SCS without requiring modifications to the Keithley system that are not explicitly described and included in the offer.
The supplier shall provide a technical integration concept as part of the tender documentation. The concept shall describe, at a minimum:
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• the electrical interfaces between the prober and the Keithley 4200A-SCS; • the FORCE/SENSE cabling paths; • signal routing and switching between terminals; • the connection and use of the chuck terminal; • measures implemented to support low-noise measurements and to minimise leakage currents, interference and ground-loop effects; • the software/control interfaces and the proposed operating concept; • all additional hardware, adapters or interface components required for integration; • the proposed procedure for installation, commissioning and functional verification of the integrated system.
The supplier shall provide1-2 days of on-site/in-situ support by a qualified technician for integration and commissioning of the delivered prober with the existing Keithley 4200A-SCS system.
The integration shall be considered successfully completed only if the relevant interfaces and measurement functions have been tested and the integrated system has been demonstrated to be operational in accordance with this specification.
Minimum requirement: The offered solution shall fulfil all mandatory integration requirements specified in this section. The qualitative assessment of the integration concept in the award evaluation concerns only the quality, robustness and additional technical benefits of the proposed solution beyond the mandatory requirements.
2.8 Electrical Supply and Mains Requirements
The complete system shall be compatible with the electrical infrastructure of IHP.
The required electrical supply is:
• 230/400 VAC, 50 Hz. • PE/N supply. • No combined PEN conductor. • 5-conductor TN-S network. • Compliance with the requirements of EMC Directive 2014/30/EU and the applicable requirements of the German EMC legislation (EMVG). • Universal EU power cord kit. • If components require other voltage levels, suitable transformers shall be provided. • If connection to the in-house UPS/USV is requested, the required connection and technical specifications shall be stated separately.
The supplier shall clearly specify all required electrical connections and power ratings in the quotation.
2.9 Dimensions and Installation Requirements
The maximum dimensions of the complete system after installation shall not exceed:
• Width: 190 cm
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• Depth: 180 cm • Height: 200 cm
These dimensions shall include all components permanently belonging to the installed system.
The largest individual part of the system shall be sufficiently small to pass through all doors from the reception area to the laboratory. The maximum dimensions of the largest individual component are:
• Width: 105 cm • Depth: 205 cm • Height: 200 cm
The supplier shall take these transport and installation restrictions into account when selecting and configuring the system.
2.10 Load Capacity and Installation
The installation shall provide sufficient load-bearing capacity for the complete system.
The required installation area and load-bearing requirements shall be stated by the supplier. The relevant shelf/support component shall have a minimum load capacity of 50 kg, where applicable.
All components required for safe and proper installation shall be included in the scope of supply.
2.11 Delivery, Installation and Commissioning
The scope of supply and services shall include:
• Packaging and shipment of the complete system. • Delivery of the complete system to Laboratory B2.55 at IHP. • Transportation and positioning at the designated installation location. • Complete installation and setup. • Connection and configuration of all system components. • Installation and configuration of the software. • Commissioning of the complete system. • Testing of all relevant sub-functions. • Functional testing in the presence of an IHP operator. • Integration with the existing Keithley 4200A-SCS. • Support in establishing operational readiness. • Instruction/training of the responsible operators in the essential system functions.
Delivery shall take place only after prior coordination with and approval by IHP.
The manufacturer/supplier shall specify the earliest possible delivery date in the quotation.
For deliveries from outside the European Union, the supplier shall also act as the importer and shall be responsible for all associated import-related requirements and formalities.
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2.12 Documentation
The following documentation shall be supplied, at minimum in electronic format, e.g. PDF:
• User manuals. • Operating instructions. • Installation and commissioning instructions. • Maintenance-related documentation. • Technical data sheets. • Circuit diagrams and electrical schematics. • Documentation of electrical connections. • Software documentation and system configuration documentation where required for operation and maintenance.
Documentation shall be provided in German or English.
All safety instructions and warning notices, including safety and warning stickers, shall be provided in German or translated into German. Any translation shall be clearly identified as a translation.
2.13 Standards, Directives and Compliance
The complete system shall comply with all applicable statutory requirements, safety regulations, and standards valid at the time of delivery.
In particular, the system shall comply with:
• Applicable CE requirements. • The applicable EU Machinery Directive / European machinery legislation in its current version. • EMC Directive 2014/30/EU. • Applicable requirements of the German EMVG. • Applicable electrical safety requirements for operation on the IHP TN-S network.
All required declarations of conformity, CE documentation, and other relevant compliance documentation shall be supplied with the system.
2.14 Warranty and Spare Parts
The supplier shall provide at least 10 spare Kelvin probes/probe tips.
The warranty period shall be at least two years, commencing from the date on which the system is considered ready for normal operation following successful installation, commissioning, and acceptance.
The warranty shall cover, at a minimum, the proper functioning of the supplied system components and the rectification of defects attributable to the supplier occurring during the warranty period.
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- Place of performance
The place of performance for delivery, installation, commissioning, and integration shall be:
IHP – Leibniz Institute for Innovative Microelectronics Laboratory B2.55
The complete system shall be delivered to the designated laboratory and installed there in a fully operational condition.
The supplier shall take into account the local transport conditions and the maximum dimensions of the largest individual component of 105 × 205 × 200 cm (W × D × H).
The delivery date and time shall be coordinated with IHP in advance and shall require IHP approval.
- Delivery period
The supplier shall clearly state in the quotation the earliest possible delivery date and/or the expected delivery period following placement of the order.
Delivery of the complete system shall take place only after prior coordination and approval by IHP.
The delivery period shall cover the complete delivery of all components required for operation, including:
• Prober system and chuck. • Probes and probe tips. • Temperature-control system. • Microscope and camera systems. • Anti-vibration table. • PC, displays, and control components. • Software and required licenses. • Cables and interfaces. • Documentation. • Spare Kelvin probes. • All other accessories required for proper operation.
Following delivery, installation, setup, commissioning, and integration shall be performed without avoidable delay.
The services shall be considered fully completed only after successful commissioning and functional testing of the relevant sub-functions and successful integration with the existing Keithley 4200A- SCS system.
The supplier shall also specify in the quotation:
• The earliest possible delivery date. • The expected delivery lead time.
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• The expected duration of installation and commissioning. • The expected duration and earliest possible date for the on-site/in-situ integration support.
- Commercial Offer
The supplier shall submit its commercial offer in accordance with Annex 1 – Price Schedule / Pricing Form, which forms an integral part of this specification.
The Price Schedule shall be completed in full and submitted together with the technical offer.
Unless explicitly stated otherwise by the supplier, the quoted total price shall include all equipment, components, accessories, software, licenses, cables, interfaces, delivery, installation, commissioning, integration, documentation, and other services required for the complete and proper operation of the system in accordance with this specification.
Any deviations, exclusions, or additional costs shall be clearly identified by the supplier in the Price Schedule.
- Evaluation of bids
The evaluation of the tenders will be carried out in accordance with the evaluation criteria and weighting specified in Annex 2 – Evaluation Criteria.
- Terms and conditions of the tender
- Tenders shall be submitted electronically in text form in accordance to section 126b of the German Civil Code (BGB).
- By submitting a tender, the tenderer confirms that it complies with all the requirements of this service description.
- Changes or additions to the tender documents by the tenderer are not permitted and may result in the tender being rejected.
- Alternative tenders are not permitted.
- The bidder is bound to their bid until the award deadline specified in the announcement.
notes:
- The supplier is obliged to take back packaging free of charge at the request of the client.
- By submitting the offer, the bidder confirms compliance with the execution and delivery deadlines specified in this service description.
- The bid shall be submitted electronically in text form. A handwritten signature is not required.
- After the contract has been awarded, a letter of engagement shall be drawn up. A separate contract ☐ shall be concluded / ☐ shall not be concluded.
Place, date: _____________________________________
Name of the company / bidder (text form): __________________________________________
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