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Annex3_Cleaning_and_Assembly_Procedure_stamped.pdf

Herstellung und Lieferung von 10 Power-Kopplern nach technischen Spezifikationen und Zeichnungen

Extrahierter Dokumenttext · Stand: 06.10.2026, 15:38 (Europe/Berlin)

Herkunft: www.tender24.de

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[Seite 1]

Annex 3 to the Technical Specifications

Procurement of power couplers
for
the European XFEL Facility

Cleaning and Assembly procedure


December 2013 6202.70.90 :.taD

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[Seite 2]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Preparation of assembly kits 2 ISO 6 I Cleaning of 2 cold parts + transition wave guide cavity + chassis 3 ISO 4 I Drying cycle Hall I Particle count / preassembly of cold parts 4 I

5

Assembly of cold parts and closing valve
+ Leak test
+ Mounting on the chassis

I Cleaning of 2 warm parts + screws 6 I Drying cycle I Preassembly of 2 warm parts 7 I

8

Assembling warm part 1 on the cold part 1
+ pumping system + Leak test

I

9

Assembling warm part 2 on the cold part 2
+ pumping system + Leak test
+ pumping system on cold part + Leak test

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[Seite 3]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Preparation of assembly kits
Stage 2

Tasks

Prior to any mounting verify the availability of following pieces and prepare each kit.

Process on cold parts

Kit for the cold part (fill sheet 1): 2 cavity seals (I72-CP-005) 16 threaded rod M6x40 (S06) + 16 washers M6 + 16 copper nuts M6. 2 pick up. 2 seals CF16. 12 pick up screws + 12 washers M4 + 6 duo-nuts. 1 valve. 1 tube. 2 seals CF40. 12 stainless steal screws M6*35 + 24 washers + 12 nuts M6 copper.

Process test frame

Kit for the test frame (sheet 2): 4 frame wheels. 3 screws H M880, 6 washers M8, 3 nuts M8, 6 nuts M12. 4 screws H M880, 8 washers M8, 4 nuts M8. 6 threaded rods, 24 washers M8, 24 nuts M8. 2 washers for holding warm parts.

Process warm parts (2 kits to prepare)

Kit for the warm part n°1(sheet 3 and 4): 1 antenna screw. 1 CF100 seals. 16 copper screws M8*35 + 16 washers M8.

2 pick ups. 12 screws for pick up + 12 washers M4 + 6 duo-nuts. 1 diagnostic window + diaphragm. 6 screws window + 6 washers M4 + 3 duo-nuts. 3 seals CF16.

2 copper springs. 1 CF25 seal. 4 screws CHC, ISO 4762,, ISO 4762, copper M6*20, 4 washers.

2 half flanges test frame/warm parts. 6 screws CHC, ISO 4762, M6*30 + 6 washers.

1 screws M8*45 + 1 washers M8.

1 seals CF 40.

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[Seite 4]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

6 screws stainless steel M6*35 + 12 washers + 6 nuts M6 copper.

Process Transition Wave Guide (TWG) boxes coppers

Kit for the TWG (sheet 5): 2 aluminium washers. 4 stainless steel half flanges. 8 stainless steel screws H, ISO 4017 M410, 28 washers M4, 20 nuts M4. 2 polarization rings. 32 screws stainless steel CHC, ISO 4762, M38, 32 washers M3. 2 mechanisms for antenna adjustment. 8 screws stainless steel CHC, ISO 4762, M410, 8 washers M4. 16 screws Z, ISO 7045, M48.

Process dismounting the TWG boxes

Additional kit for the TWG (sheet 6): 2 brass blind flanges 2 lemo feedthroughs, 2 viton seals, 2 invar rings, 2 nuts.

Process pre-transport

1 kit pre-transport (sheet 7): 3 blind flanges CF 40. 3 viton seals CF40. 18 screws stainless steel M6*35, 36 washers, 18 nuts copper.

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[Seite 5]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Cleaning of 2 cold parts / wave guide transition cavity / test frame
Stage 3

ISO 6 Preparation

Make sure that the N2 bottle, which is outside of the clean room, is open and under pressure of 4 bar.

Necessary material

Kits: 1 kit Cold parts 1 kit Test frame

Parts: Wave guide transition cavity 2 cold parts 1 Tube CF40 1 valve CF40 1 Test frame+1 washer+ 2 separators

Consumables: 5L of Tickopur R33 liquid detergent

In the clean room: 1 adaptation CF/KF 40 1 viton seal CF 40. 2 cold ceramic caps. 2 viton seals CF 100.

Tasks

Write down the reference of the mounting

First cleaning: Control the state of the transition cavity, the 2 cold parts, the pick-ups and the CF40 tube Put the parts into the ultrasound bath (do not clean the valve) Fill the ultrasound bath with ultrapure water Add the Tickopur detergent (1 L detergent / 40 L water) Set the bath at 50°C for 15 minutes Launch the cleaning Take out the parts and rinse them (6x) Do the measurement of the ohm resistance of the rinsing water from the cold parts and the transition cavity (if > 14Mohm go on to the next step if not continue rinsing) Leave all parts in the ISO4 clean room to dry (coupler orientation: antenna down) Blow with ionized nitrogen on all parts to accelerate

Second cleaning: Clean the screws (same ultrasonic bath, for 15 minutes at 50°C) Rinse the screws (6x) Leave all parts in the ISO4 clean room to dry

Third cleaning: Clean the test frame, the washer and the 2 separators (same bath, 15 minutes at 50°C) Rinse (6x) Leave all parts in the ISO4 clean room to dry on a cloth to dry for 48h.

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[Seite 6]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Particle count / pre-assembly of cold parts
Stage 4

ISO4 Preparation

Make sure that the N2 bottle, which is outside of the clean room, is open and under pressure of 4 bar.

Necessary material

All parts from the previous stage

Tasks

Write down the reference of the mounting

Visual inspection: Do the visual inspection of all cleaned parts

Particle count in cold parts: Blow on the cold parts with filtered ionized nitrogen as shown in picture here on the right Launch the recording of the particle count Measure for 1 min, if fewer than 10 particles of size under 0.3µm, controlled part considered clean. If result not achieved, restart the count until result reached If over 9 cycles of 1 min are not giving the aforementioned results, the part being controlled is considered not clean and has to be re-cleaned in the ultrasonic bath. Execute the previous tasks on the positions shown in pictures here below:

Print the count ticket. Execute all these tasks on the second cold part.

Particle count on the transition cavity: Place the threaded rods on the transition cavity while the blind flanges are on Attention: The operator must be standing opposite from the pumping flange Execute the particle count according to the aforementioned cycle in both positions shown on pictures here below

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[Seite 7]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Pre assembly for backing: Mount first cold part on the transition cavity with nuts (CuSi2Ni) and washers

Attention: The cold pick up and the pumping port must be in opposition (see picture)

Do the same with the second cold part Mount the 2 pick ups (screws, washers and duo-nuts)

Assemble the valve and its tube (the valve must be mounted so as to have its closing system easily accessible)

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[Seite 8]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Assembling the cold part and the valve + Leak test + Mounting on the test frame
Stage 5

ISO 4

Preparation

Necessary material

All parts from the previous stage

Tasks

Do the visual check Put the 2 viton CF100seals, put the 2 caps and fix them with the CuSi2Ni screws Mount the valve with the tube (valve exit oriented up) Close the valve Mount the adaptation and attach the leak detector bellows to the valve

Leak test: Start the detector Open the detector valve Slowly open the coupler valve Do the helium sweep over all weldings, bellows and sealed connections Close the coupler valve Close the detector valve Brake the vacuum in the detector bellows Detach the detector bellows

Mounting the cold assembly on the test frame: Block the 4 wheals of the frame to make it stable Fix the cold assembly on the test frame along with the 2 nuts as separators Put the entire assembly on the cart

Preparation of the test frame: Put the aluminium separators on the test frame Put and fix the big washer (see picture here on the right)

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[Seite 9]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Cleaning of 2 warm parts + screws
Stage 6

ISO 6 Necessary material

Kits: 2 kits warm parts

Parts: 2 warm parts 2 push rods 2 ceramic protection caps

Consumables: 5L of Tickopur R33

In the clean room: 1 hollow screws wrench 2 warm part pumping groups

Tasks

Write down the reference of the mounting

First cleaning: Control the state of the 2 warm parts, the push rods, the pick-ups and the diagnostic windows Put the parts into the ultrasound bath Fill the ultrasound bath with ultrapure water Add the Tickopur detergent (1 L detergent / 40 L water) Set the bath at 50°C for 15 minutes Launch the cleaning Take out the parts and rinse them (6x) Do the measurement of the ohm resistance of the rinsing water from the cold parts and the transition cavity (if > 14Mohm go on to the next step if not continue rinsing) Leave all parts in the ISO4 clean room to dry (coupler orientation: ceramic on top) Blow with ionized nitrogen on all parts to accelerate

Second cleaning: Clean the screws (same ultrasonic bath, for 15 minutes at 50°C) Rinse the screws and other parts (caps, diaphragms) (6x) Leave all parts in the ISO4 clean room to dry

Leave all to dry in an ISO 4 clean room for at least 48h

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[Seite 10]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Pre assembly of warm parts
Stage 7

ISO 4 Necessary material

Parts from the previous stage

Tasks

Write down the reference of the mounting

Control: Control the state of the 2 warm parts, the push rods, the pick-ups and the diagnostic windows

Assembly of the pick-ups and the diagnostic windows: Dispose the 2 warm parts on the table with pumping ports opposite as shown in the picture here to the right Mount the diagnostic windows (oriented towards the operator) enclosing the diaphragms with the washers Mount the picks-ups (oriented away from the operator)

Assembly of the push rods: Put the 2 RF springs on the push rod (see picture on the right) Test the hold of the springs by inserting the push rod in and out of the warm part Do the same for the second push rod

Mounting of the antenna screws: Put the hallow screw on the corresponding wrench Insert the previous into the warm part as shown on the picture below left Screw on until the screw is freed from the thread Do the same on the second warm part

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[Seite 11]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Mounting the warm part 1 on the cold part 1 Adding the pumping group + Leak test
Stage 8

ISO 4 Preparation

Necessary material

Parts from the previous stage

Tasks

Perform the visual check

Mounting of the warm part: Take off the protection caps of the cold part ceramic Put the CF100 seal Slide down the warm part (CF40 oriented opposite from the other coupler) when the flanges are 4 cm apart start putting on and tightening the antenna screw all the way than unscrew ¼ of a circle Control if the two parts are connected by pulling slightly on the warm part Slightly tighten the CF100 flange with the CuSi2Ni screws Tighten completely the central screw

Flanging the warm part: Place the 3 supporting rods, with nuts slightly touching the surface for those under the CF40 flange Install the flange supporting the bellows together with the 2 semi flanges Adjust the plate (see picture) Tighten fully the CF100 flange so as to make it hermetic

Mounting of the push rod: Place the CF25 seal Screw the notch Introduce the push rod and turn it ¼ of a circle Pick it up a bit to verify the engagement Tighten the flange with the CuSi2Ni screws M6x20 CHC, ISO 4762, Put on the protection cap for the warm ceramic

Mounting the warm part pumping group: Mount the warm pumping group horizontally with the valve in the opposite direction from the cold valve Verify the plate supporting the bellows

Leak test: See procedure

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[Seite 12]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Mounting the warm part 2 on the cold part 2 Adding the pumping group + Leak test + pumping system on cold part + Leak test
Stage 9

ISO 4 Preparation

Necessary material

All parts from the previous stage

Tasks

Perform the visual check Mounting of the warm part: Take off the protection caps of the cold part ceramic Put the CF100 seal Slide down the warm part (CF40 oriented opposite from the other coupler) when the flanges are 4 cm apart start putting on and tightening the antenna screw all the way than unscrew ¼ of a circle Control if the two parts are connected by pulling slightly on the warm part Slightly tighten the CF100 flange with the CuSi2Ni screws Tighten completely the central screw

Flanging the warm part: Place the 3 supporting rods, with nuts slightly touching the surface for those under the CF40 flange Install the flange supporting the bellows together with the 2 semi flanges Adjust the plate (see picture) Tighten fully the CF100 flange so as to make it hermetic

Mounting of the push rod: Place the CF25 seal Screw the notch Introduce the push rod and turn it ¼ of a circle Pick it up a bit to verify the engagement Tighten the flange with the CuSi2Ni screws M6x20 CHC, ISO 4762, Put on the protection cap for the warm ceramic

Mounting the warm part pumping group: Mount the warm pumping group horizontally with the valve in the opposite direction from the cold valve Verify the plate supporting the bellows

Leak test: See procedure

Mounting of the cold part pumping group: Mount the pumping group on the cold part. Make sure the orientation is well respected

Leak test: See procedure

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[Seite 13]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

General procedures for working in a cleanroom

1. General information

a. Cleanroom security

The work in a cleanroom is always performed in a team of at least two people.

In case of fire the first thing to do is to press the general stop button (above the rinsing bath), so as to cut off the air treatment system.

b. Disposition of the LAL cleanroom

Blue areas represent the zones with filtered laminar air flow ceiling sources.

The blue areas with denoted with dark blue lines are also equipped with the evacuations for the laminar air flow.

Numbers going from 1 to 25 represent the positions for the air control samples.

c. Monitoring of the cleanroom cleanness

Air must be regularly controlled via particle counter (every 3 months) and at every major even (beginning and end of each coupler series, when entering any large equipment, after CAT (central for air treatment) failure) according to the following sampling system:

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[Seite 14]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Spots 1 to 6: 9 square feet of air to be analyzed spot by spot (see the scheme here before)

Spots 7 to 25: 3 square feet of air to be analyzed spot by spot (see the scheme here before)

All work surfaces are to be controlled by UV lamp as often as the air control (or more often).

d. Maintenance of the cleanroom

Following table shows the surfaces to be clean and how often it is to be done:

Surface typeFrequency
FloorDaily
WallsWeekly en ISO4 Monthly elsewhere
CeilingsWeekly en ISO4 Monthly elsewhere
Air source and evacuation gridsWeekly en ISO4 Monthly elsewhere
Light sourcesWeekly en ISO4 Monthly elsewhere
WindowsWeekly en ISO4 Monthly elsewhere (including the outside)
Doors and door knobsDaily
CurtainsWeekly
Garbage disposal and basket cleaningDaily
Changing of sticky carpetsDaily
LockersMonthly
Bench, sink, mirrorsDaily
Boxes et cartsDaily
ShelvesWeekly
Work surfaceDaily
UV and rinsing bathWeekly
Vacuum bellowsWeekly
Telephone and intercomDaily
ExtinguisherWeekly

e. Maintenance of the coveralls

Cleanroom overalls must be delivered and cleaned weekly by specialized manufacturer.

Each operator must have 3 pieces of overalls: 1 for the current week, 1 in case of an accident, and 1 being cleaned.

Each overall is delivered within sealed bag with the operator’s name clearly indicated, along with the results of the particle count.

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[Seite 15]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

f. Appropriate consumables

Following table indicates a list of consumables allowed for use in a cleanroom:

ConsumableSpecificationsReferenceProvider
Alcohol soaked wipesProsat 911Argos
Dry wipesQuiltec 1Argos
Alcohol filtered in barrelsBacty SP 5LConformat
Alcohol sprayPhagogeneArgos
Sticky carpetsWM 1845 WConformat
Face masksWorld Class PCM 2000Argos
GlovesNatural Latex & Non powdered individual packagingAnsell industriels AccuTech 91-325Argos
MobcapsRonde 21’’AIS Alizé
Overshoes
Paper sheetsBCR Bond 850AIS Alizé
Post itTX 5820Conformat
Cleanroom pensAlmaAIS Alizé
Cleanroom duck tapeCR100 PC1Conformat
Gas filteringFilter 0.2 microns Durapore GVHP02500 Support filter XX4002500Millipore
Detergent for ultrasoundTickopur R33Labo Moderne
Disposable overallsNexgen Laboratoire with feet and hoodArgos

2. Work in the cleanroom

a. Personnel entrance

i. Preamble:

Maintaining the state of extremely high cleanness of the room as well as of all objects within the room demands these three conditions to be respected:

  • Do not introduce any contamination into the room
  • Do not work in the room so as to produce contaminants
  • Evacuate as well as possible all residual contamination.

We recall that most of contaminants come from humans (hair, lashes, skin particles, sweat, spit, etc.), their clothes (cotton rejects large amount of particles), or their behavior (brusque gestures, position of the body in respect to the object to clean, etc.).

Procedures described hereafter must be applied for all of the three major stages which are under the aforementioned constraints and present the risk of contamination:

  • personnel entry
  • equipment entry
  • work in the cleanroom

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[Seite 16]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

ii. Personnel entry:

The personnel must entre the cleanroom through the personnel hatch only. Several steps are to be made on the sticky carpet so as to avoid bringing the contaminants into the hatch.

The personnel before entering the cleanroom must do the following:

  • Take off the coats, all cotton based clothes (as much as possible), tool box, etc.
  • Wash your hands if they are filthy

After this the personnel may enter the “personnel hatch” so as to get dressed in the clothing not rejecting particles and confining those produced by the human or his clothes.

The dressing procedure is the following:

  • Take off (if you have) the sweater and the watch and all other accessories, and put them in the locker.
  • Prepare to cross over the bench o Sit on the bench, both feet towards the exterior o Take off the shoe from the foot closer to the bench, be careful not to touch the ground with the bare foot o Cross that leg over the bench o Take off the second shoe and do the same as with the first leg
  • Put a mobcap over your hair o All hair must be covered
  • Put on the mask o Tighten the mask over your nose o Tighten the mask under your chin (cover all of your beard if you have any) o Fold the mask down (no retention of particles)
  • Take and put on an overall o Hold it by the inside o Put it on by holding it so that the legs and sleeves do not touch the ground o Put on the hood o Close the zip fastener, knot the tie on the back of the head and button the hood
  • Put on the overshoes (with security shoes) o Button the pressure buttons of the overshoes onto the overalls o Tighten the ties around the ankles and tights
  • Put on the gloves o Take them by the insides o Put them on o Role them over the overall sleeves
  • Check in front of the mirror o Tightness of the fasteners o Hair well concealed

The procedure of entry into the cleanroom is the following:

  • Make several steps on the sticky carpet in front of the air shower
  • Go under the air shower
  • Stay there for 1 minute
  • Enter the ISO6 zone

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[Seite 17]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

iii. Personnel exit

After the air shower, return to the city clothes is performed in the following way: 1- In the personnel hatch “cleanroom side” of the bench take off the overshoes (leaving the security shoes inside) 2- Take the sleeves out of the gloves without taking the gloves off 3- Take off the overall, put it on its hanger and place it in its locker 4- Cross over the bench, 5- Put the city shoes on and take your personal effects 6- Dispose of the mask, mobcap and the gloves in the dedicated garbage 7- Leave the cleanroom.

b. Work in the cleanroom

  • When working on parts do not lean over the parts so as to avoid exposing them to contaminants and leave them directly under the airflow.
  • Do not make brusque movements.
  • Moving across the cleanroom must be performed as slowly as possible.
  • If a piece falls on the floor, it must be cleaned with the alcohol soaked cloth.

c. Procedure for bringing equipment into the cleanroom:

  • Outside of the cleanroom: treat the parts (eventually leave the parts in their protection bags) according to their size and the degree of filthiness, with at least one of the following treatments: o Wipe with alcohol soaked cloth o Blow with clean air and then wipe with alcohol soaked cloth o Sink in a container filled with filtered alcohol (eventually clean the part with acetone) o Clean in a small ultrasonic bath
  • Enter the part(s) in the equipment hatch. In the equipment hatch perform the following operations: o Wipe again with alcohol soaked cloth o If there is any, take off the protection bag and clean with alcohol soaked cloth
  • Enter the part(s) in the cleanroom ISO6 and perform the following operations: o Leave parts in the ultrasonic bath for 15 minutes at 50 °C with 5L of Tickopur R33 in 200L of ultra pure water o Rinse in a dedicated sink with ultra pure water, measure the resistance of the remaining water, continue rinsing until the resistance is under 14 MΩ .cm o Leave the parts to dry in the ISO4 zone o If the part to be cleaned is bigger than the ultrasonic bath clean it with the alcohol soaked cloth and introduce to the ISO4 zone.

d. Cleaning of parts in the ultrasonic bath

Cleaning of the coupler (or tools or other) consist in sinking the coupler in a bath of ultra pure water and specific detergent with the action of ultrasounds.

  • Place the parts in the bath on the grid (or in the dig for the small parts or screws). Position the parts in a way so as to avoid creation of air bubbles and also so that the particles detached by the ultrasounds may fall straight at the bottom of the bath.
  • Fill the bath with water, move the parts during the filling so as to avoid air bubbles which would perturb the action of the ultrasounds,
  • Put in the wanted quantity of detergent,

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[Seite 18]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

  • turn on the heating of the bath at 50 °C,
  • turn on the ultrasounds for 15 minutes (fyi their power is 2 kW),
  • from this moment on do not put hands in the bath because the ultrasound can cause serious burns !,
  • wait for 15 minutes,
  • after turning off the ultrasounds, turn off the heating (mostly for safety reasons),
  • take the parts out,
  • rinse them (see here after),
  • dry them (see here after),
  • empty the bath so as to leave it available for cleaning by the cleaning crew: o turn the main evacuation valve to “general evacuation”, o do not put the cover over the bath !

e. Rinsing

The cleaned parts must be rinsed with ultra pure water. The rinsing is performed with a hand shower for a total of at least 10 minutes. The rinsed part will be turned around so as to rinse including the alcoves. We recall that a rinsed part is either the cold or the warm part of the coupler, and that in both cases the bellows area must be rinsed at least 6 times.

f. Drying

The parts are introduced to the ISO4 area, where they dry on a perforated table under laminar flux for 24h. Different parts are to be positioned as follows: • cold part: on the supporting stand vertically, the antenna towards the floor • warm part: on the supporting stand vertically, CF100 flange towards the floor • transition cavity: coupler ports towards the floor • small parts are to be displayed on a cleanroom approved cloth.

If necessary the drying of parts may be accelerated by blowing of the filtered nitrogen.

g. Leak test

Use the leak detector situated outside of the cleanroom. Follow the procedure for performing the leak test so as to ensure the non pollution of tested parts by the hydrocarbons coming from the detector’s pumping group.

Also the assemblies must be hermetic to helium with a leak rate lower than 10 –10 mbar.L/s. In order to preserve the purity of the cleanroom, helium (and nitrogen) used has to be of “standard quality” but its tube’s exit must be equipped with a particle filter (e.g. Millipore filter 0.2 µm). Furthermore, for helium a screen for absorption of water and hydrocarbons must be installed between the helium container and the filters.

h. Equipment exit

Put the “clean cart” with all object to get out of the cleanroom in the equipment hatch. Transfer everything from the “clean” onto the “unclean” cart.

Remarque: Unless in case of emergency, the personnel must not enter or exit through the equipment hatch.

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[Seite 19]

1.3GHz Power Couplers/ ref: XFEL-WP05_DCE_ANX_13

Also particular attention must be dedicated, to have only one door open when any entry or exit is occurring, so that the hatches keep their role of intermediate region protecting the cleanroom from the outside.

i. Braking the vacuum

In general, the vacuum should be broken with standard quality nitrogen, but dry and filtered. The desired quality is described in the following table:

SpecificationsVolume (ppm)Nitrogen standard IC (ppm)
02< 0.5< 5
H20< 2< 3
HC< 0.1< 1.5

It is convenient to use particle filters (e.g. Millipore filter 0.2 µm) installed at the stainless steal pipe exit or as close to where the nitrogen is being used.

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