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| PR-Nummer: | PR1285582 | |||||
|---|---|---|---|---|---|---|
| Los: | 1 | |||||
| Hauptauftragsgegenstand: | 2D X-ray microscop | |||||
| Menge: | 1 | |||||
| Ausgangslage und Kontext | ||||||
| Kurzbeschreibung/-zusammenfassung des Projektes und des Auftragsgegenstands | ||||||
| The X-ray system to be procured is intended for non-destructive 2D X-ray inspection of components ranging from small parts to medium-sized assemblies. In particular, it is intended for the inspection of embedded circuits with structures in the low single-digit micrometer range, such as MEMS packaging via wafer molding, chip-in-polymer, system-in-package, etc. In addition, a correspondingly large power reserve is required for the inspection of power electronics assemblies with heat sinks featuring copper layers up to 6 mm thick. | ||||||
| Kommerzielle Rahmenbedingungen | ||||||
| Budget | ||||||
| The budget of 300.000,00 € net must not be exceeded. Exceeding this amount will result in exclusion from the process. | ||||||
| Leistungsverzeichnis | ||||||
| Legende Leistungskategorisierung | ||||||
| F | Forderung: Leistungsverzeichnispositionen, die in Spalte E mit einem F gekennzeichnet sind, müssen zwingend erfüllt werden (Mindestanforderung an die Leistung). Eine Nichterfüllung oder keine Angaben führen zum Ausschluss des Angebots. | |||||
| B | Bewertungskriterium: Leistungsverzeichnispositionen, die in Spalte E mit einem B gekennzeichnet sind, dienen der Bewertung der Angebote. Die genaue Bewertungsmethodik kann der Anlage "B_003_Zuschlagskriterien" entnommen werden. | |||||
| Bitte tragen Sie Ihre firmeneigene technische Beschreibung in das Dokument "2D Röntgenmikroskop_BieterName PR1285582" ein, damit die ausschreibende Stelle Ihr technisches Angebot fachgerecht mit dem Leistungsverzeichnis abgleichen kann. | ||||||
| Technische Beschreibung / Spezifikationen | ||||||
| LV Pos. | Bezeichnung der Leistungsposition | Beschreibung der Leistung | F/B/O/I | Punkte B- Kriterien (max. 100 Punkte) | Menge | Leistungseinhei t |
| 1.01 | Anlage / System | 2 D-Röntgenmikroskop | F | 1 | Stück | |
| 1.02 | Resolution / Focus size | Spatial resolution Line/space (in best operation verification by a suitable 2D resolution preparation) <500 nm (20 P) 500-800 nm (10 P) 800 nm - 1µm (5P) | B | 20 | ||
| 1.03 | Tube power | Maximum tube power output : 20 W Acceleration voltage setting range (kV): min 20-160 | F | |||
| 1.04 | Tube design | Open system with replaceable cathode and (diamand)-target (20P) closed system - (15P) | B | 20 | ||
| 1.05 | Sample weight: | 6-10 kg (10P) 4-6 kg (5 P) < 4 kg (1 P) | B | 10 | ||
| 1.06 | max. Sample size: | 310 × 460 mm² (18x12 " inspectable area – ideal) - 20 P 300 × 300 mm² (12x12" inspectable area ) - 10P <300 x 300 mm² (< 12x12" inspectable area) - (1 P) | B | 20 | ||
| 1.07 | Detector | Grayscale Range: min 14 bit Pixel size: max 200µm | F | |||
| 1.08 | Software | The software should be capable of managing different access permissions for operating the device. Each user should be able to work independently within an individual user profile. A connection to a data network should be available for transferring images and measurement reports. For recurring routine inspections, it should be possible to perform automated inspections of components. In this context, the position of the individual components, image processing, and image capture must be programmable. Evaluation software for parameters such as porosity and pore size must be available and should be expandable in a modular fashion. | F | |||
| 1.09 | Vibration isolation | System must have build-in vibration isolation or comes with a vibration isolation table | F | |||
| 1.10 | Laminography | The X-ray system should be capable of generating a spatially limited laminography from any point within the inspectable area. Available : 20 P not Available: 10 P | B | 20 | ||
| Spezielle Vorgaben, Qualität und Qualifikation | ||||||
| LV Pos. | Bezeichnung der Leistungsposition | Beschreibung der Leistung | F/B/O/I | Punkte B- Kriterien | Menge | Leistungseinhei t |
| 2.01 | The system must meet requirements of the installation site | - Room temperature 21°C +/-3°C - Humidity (rel) 50% +/-25% - Noise generation ≤ 74dB - Max. height x width for machine bring in: 240cm x 180 cm - Raised floor area load: 750 kg/m² | F | |||
| 2.02 | Power requirements | System should electrically support the following supply. 230VAC, 1 phase, 3 wires, 50Hz | F | |||
| 2.03 | Size requirement | System footprint must not exceed the size of 2,2 m x 2 m | F | |||
| 2.04 | Documentation | The documentation for the customer should contain the following content in German and English: Operating instructions, explosion protection assessment, specification of the relevant system components, circuit diagram, control plan, maintenance plan and alarm plan | F | |||
| 2.05 | Documentation | Procedures for normal operation, maintenance and faults must be included in the operating instructions | F | |||
| Normen und Sicherheitsrichtlinien | ||||||
| LV Pos. | Bezeichnung der Leistungsposition | Beschreibung der Leistung | F/B/O/I | Punkte B- Kriterien | Menge | Leistungseinhei t |
| 3.01 | General specification safety | Required CE certificate must be clearly visible on the system and the original declaration of conformity must be handed over to the customer | F | |||
| 3.02 | General specification safety | The radiation safety cabinet must be a full protective installation without type approval according to the German RöV | F | |||
| 3.03 | General specification safety | If the system contains a laser, the relevant performance characteristics and their classification in accordance with German law must be included in the documentation for the customer | F | |||
| 3.04 | General specification safety | Supplier shall provide the customer with all necessary documentation required for submission to the relevant authority or other third party in order to obtain an operating license or similar certificates within 4 weeks | F | |||
| 3.05 | General specification safety | New safety-relevant information that the system manufacturer receives after the system has been delivered must be communicated to the customer immediately. | F | |||
| 3.06 | General specification safety | All materials in the system should be non-combustible or at least flame-retardant | F |
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| 3.07 | General specification safety | System should be ergonomically designed to ensure human interaction in a safe and productive manner. The ergonomic design should be based on SEMI S8 | F | |||
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| 3.08 | General specification safety | Protection against electrostatic discharge must be guaranteed in accordance with the CECC standard. Grounding points must be provided | F | |||
| 3.09 | General specification safety | The system should be equipped with a data acquisition system that can be read digitally via an interface and used to record the machine's performance characteristics and status (e.g., start time, end time, number of samples processed, process parameters, number of samples used, etc.). Available : 10 P not Available: 5 P | B | 10 | ||
| 3.10 | General specification safety | Firmware should be able to save system errors and display them again later (e.g. error number, error message, time when the error occurred, ...) | F | |||
| 3.11 | General specification safety | If the system contains a laser, the relevant performance characteristics and their classification in accordance with German law must be included in the documentation for the customer | F | |||
| Schulung und Einweisung | ||||||
| LV Pos. | Bezeichnung der Leistungsposition | Beschreibung der Leistung | F/B/O/I | Punkte B- | Menge | Leistungseinhei |
| 4.1 | Training | Training for system calibration and preventive maintenance if not included in base training | F | Kriterien | t | |
| 4.2 | Training | The system manufacturer will provide training sessions for two engineers and provide corresponding certificates after successful instruction. The following contents should be part of the training: | F | |||
| - Procedures for putting the system into operation | ||||||
| - Procedures for safely switching the system to standby mode or switching it off. | ||||||
| - Working in manual and automatic mode. | ||||||
| - Use of special machine functions. | ||||||
| - Parameter setup | ||||||
| - Machine setup and machine conversion | ||||||
| - Interpretation of error codes and procedures for recommissioning. | ||||||
| - Detailed troubleshooting procedures. | ||||||
| - Maintenance measures and regular checks. | ||||||
| - Creation of recipes. | ||||||
| - Possible risks for wafers, machines and people during operation, maintenance and servicing work. | ||||||
| Installation und Wartung | ||||||
| LV Pos. | Bezeichnung der Leistungsposition | Beschreibung der Leistung | F/B/O/I | Punkte B- | Menge | Leistungseinhei |
| 5.01 | Installation and support | The system installation must be carried out during normal working hours on weekdays between 08:00 and 18:00. | F | Kriterien | t | |
| 5.02 | Installation and support | The system manufacturer will provide Fraunhofer IZM with a tool set containing all the necessary elementary tools required to carry out routine maintenance work on the system. In particular, the tool set must be equipped with any special tools required to carry out normal maintenance work. | F | |||
| 5.03 | Installation and support | The system manufacturer shall provide a complete set of operating instructions, electrical circuit diagrams, technical drawings, spare parts catalogues, installation instructions, preventive maintenance measures and troubleshooting measures (including all OEM products) electronically (pdf) and in printed form | F | |||
| 5.04 | Installation and support | In the event of a change in the software and/or hardware of the system, the manufacturer must ensure that a revised complete version of the aforementioned documentation is provided to the customer. | F | |||
| 5.05 | Installation and support | If there are any sensitive areas on the system as delivered, these must be clearly labelled on the outside of the packaging. In addition, the company responsible for transporting and bringing the system into the clean room should be informed of this before carrying out its work. | F | |||
| 5.06 | Installation and support | The underside of the system or system components as delivered should have 50 mm of space to allow lifting with a forklift truck. | F |
with a forklift truck.